화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2005년 봄 (04/14 ~ 04/15, 전경련회관)
권호 30권 1호, p.227
발표분야 기능성 고분자
제목 Synthesis of Photocurable Modified SiCN Precursor for NIL Process Application
초록 UV curable inorganic polymers that are sensitive to ultraviolet (UV) irradiation have been widely utilized as photoresists. For instance, in the manufacture of printed circuit boards, negative photoresists are coated on a conducting substrate. The photochemistry of cinnamates involves two photoreactions upon irradiation in the ultraviolet-B (UVB) region of the electromagnetic spectrum. UV curable inorganic polymer was prepared polysilazane(KiON VL20) with cinnamoyl chloride in the dark room. The characterization of inorganic precursor was investigated by FT-IR, 1H-NMR, 13C-NMR, 29Si-NMR, the molecular weight of polymer was analyzed by GPC, and the thermal property was investigated by TGA.
저자 김석선, 홍난영, 김동표
소속 충남대
키워드 Photocurable; photoresists; SiCN Precursor
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