초록 |
UV curable inorganic polymers that are sensitive to ultraviolet (UV) irradiation have been widely utilized as photoresists. For instance, in the manufacture of printed circuit boards, negative photoresists are coated on a conducting substrate. The photochemistry of cinnamates involves two photoreactions upon irradiation in the ultraviolet-B (UVB) region of the electromagnetic spectrum. UV curable inorganic polymer was prepared polysilazane(KiON VL20) with cinnamoyl chloride in the dark room. The characterization of inorganic precursor was investigated by FT-IR, 1H-NMR, 13C-NMR, 29Si-NMR, the molecular weight of polymer was analyzed by GPC, and the thermal property was investigated by TGA. |