화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2007년 가을 (10/26 ~ 10/27, 한국과학기술원)
권호 13권 2호, p.2147
발표분야 열역학
제목 Supercritical Cleaning of Metals Contaminant with Oils
초록 Supercritical carbon dioxide based fluid is not only being considered as environmentally benign medium for various Contaminant removal, but also capable of challenging feature dimension. Despite many attractive properties, clear supercritical carbon dioxide has little solvating power for polar material. Here, some modifiers were selected to add in supercritical carbon dioxide and evaluated contribution to overall removing rate. 4 metal substrates were employed and 5 kinds of lubricant were employed as Contaminants. Removing rate were evaluated by removed weight ratio. SEM and XPS is employed to analyze surface of substrate.
저자 장원호, 유기풍, 임종성, 홍승태, 엄용석
소속 서강대
키워드 supercritical; cleaning
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