화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2004년 가을 (10/08 ~ 10/09, 경북대학교)
권호 29권 2호, p.693
발표분야 분자전자 부문위원회
제목 Transparent flexible substrates based on polyimides with aluminium doped zinc oxide(AZO) thin films
초록 In this work, transparent flexible substrates based on polyimides(PI) with aluminium doped zinc oxide (AZO) thin films for organic electroluminescent devices have been prepared. 2,2’-bis-(3,4-dicarboxyphenyl) hexafluoropropanedianhydride (6FDA) and 2,2’-bis-(trifluoromethyl)-4,4’-diaminobiphenyl (TFDB) PI films were used for transparent flexible substrates. AZO thin films were prepared at two substrate deposition temperatures of 100˚C and 200˚C with a typical radio-frequency (r.f.) planar magnetron sputtering system. The sheet resistance and the optical transmission properties of the fluorinated PI substrate were comparable with those for the slide glass substrate. The substrate properties were better when the deposition temperature was higher. The AZO films are characterized by UV-vis spectra, AFM, four point probe, and XRD.



Table 1.

저자 박효준, 박진우, 이응규, 박진호, 하창식
소속 부산대
키워드 AZO; polyimide
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