| 학회 | 한국재료학회 |
| 학술대회 | 2004년 봄 (05/14 ~ 05/14, 강릉대학교) |
| 권호 | 10권 1호 |
| 발표분야 | Display |
| 제목 | 폴리머 기판위에 증착된 ZnO 도전막의 특성연구 |
| 초록 | 1. Introduction Zinc oxide (ZnO) films have attracted considerable attention for transparent conducting films, because of their high conductivity, good optical transmittance from UV to near IR as well as a low-cost fabrication. To increase the conductivity of ZnO, doping of group III elements (Al, B, In and Ga) has been carried out. Transparent conducting films have been applied for optoelectric devices, such as solar cells, touch panels and flat panel displays. Considering of the future applications of these devices, the development of the transparent conducting thin films on flexible light-weight substrates are required. In this research, the transparent conducting ZnO thin films doped with Aluminum (Al) on polymer substrates were deposited by the pulsed laser deposition (PLD) method, and the structural, optical and electrical properties were investigated. 2. Experimental The deposition of ZnO film was carried out in the PLD system with XeCl laser (325nm) source. The laser beam was introduced into a reaction chamber through a focusing lens. The base pressure of the growth chamber was 3×10-6 Torr. Oxygen gas was introduced to the chamber during deposition. The target was fabricated with ZnO and 2 wt% of Al2O3 compounds. The polymer substrates used in this work was polyimide (PI) made by DuPont (Kapton). The structural properties and surface morphology of ZnO films were characterized with X-ray diffraction (XRD) and atomic force microscopy (AFM). 3. Results From the XRD analysis, there was no sharp peaks in the sample prepared at room temperature. With the increasing of substrate temperature from 100℃ to 200℃, ZnO (0002) peaks were appeared, and the value of the full width at half maximum (FWHM) of (0002) peak was decreased. The surface roughness of ZnO film was relatively smooth and increased with increasing the growth temperature. The electrical properties of ZnO films deposited on polymer substrates were measured by Hall effect measurement using van der Pauw technique at room temperature. The resistivity of ZnO films prepared at 200℃ was 3.3×10-3 Ω·cm, obtaining conducting ZnO films on polymer substrates. |
| 저자 | K. J. Suh1, H. Okada2, A. Wakahara1, H. J. Kim2, H. J. Chang1, A. Yoshida2 |
| 소속 | 1Dept. of Electrical and Electronic Engineering, 2Toyohashi Univ. of Technology |
| 키워드 | ZnO film; transparent; pulsed laser deposition; resistivity |
