학회 | 한국화학공학회 |
학술대회 | 2007년 가을 (10/26 ~ 10/27, 한국과학기술원) |
권호 | 13권 2호, p.2346 |
발표분야 | 재료 |
제목 | A study on the fabrication of ZnS via various solution based thin film deposition processes |
초록 | Zinc sulfide (ZnS) is an important semiconductor material with a wide energy band gap (Eg=3.65 eV) which can be used for the fabrication of optical and electrical devices such as light-emitting diodes, photo- and electro- luminescent devices, modulator, n-window layers for thin film heterojunction solar cells, photoconductor, and photovoltaic devices. In our study, we have investigated Zinc sulfide(ZnS)thin film deposition by various deposition methods such as chemical bath deposition(CBD), successive ionic layer adsorption and reaction(SILAR), continuous flow reaction(CFR), and modified-continuous flow reaction(Spin-CFR) processes. we have used Zinc chloride(ZnCl2) and sodium sulfide(Na2S) as starting materials which are well known in this process area. Based on the our study, we may control the physical and chemical properties of ZnS thin films in terms of thickness, partical size, and stoichiometry. |
저자 | 배은진1, 정지영1, 이두형1, 류시옥1, 이태진1, Chih-Hung Chang2 |
소속 | 1영남대, 2오레곤주립대 |
키워드 | ZnS; thin film |
원문파일 | 초록 보기 |