| 학회 |
한국공업화학회 |
| 학술대회 |
2014년 봄 (04/30 ~ 05/02, 제주국제컨벤션센터) |
| 권호 |
18권 1호 |
| 발표분야 |
포스터-환경.에너지 |
| 제목 |
Abatement of CF4 Using a 2.45 GHz Microwave Plasma Torch with an Enhanced Reverse Vortex Plasma Reactor |
| 초록 |
The high energy density and temperatures associated with thermal plasmas and the corresponding fast reaction times offer the potential of large throughputs in a small reactor. A 2.45GHz microwave plasma torch was presented as a tool for abatement of CF4 gases with a novel plasma reactor of reverse vortex. Detailed experiments were conducted on CF4 the in terms of destruction and removal effciency (DRE) using Fourier transform infrared (FTIR). The plasma discharge gas is injected from the plasma torch holder (50lpm air) and mixed gas is injected from a novel plasma reactor with a reverse vortex flows of 250lpm (1000ppm CF4 in N2 gas). The plasma discharge gases were increased over the 3~5 times because of reverse vortex plasma reactor and then, capacity of abating flow rate were increased also. The DRE of 99.5% for CF4 was achieved without and additive gas at the total flow rate of 300 liters per minute (lpm) by applying a microwave power of 5.5kW. |
| 저자 |
김지훈1, 신용욱1, 조창현1, 신동훈1, 홍용철1, 구동진2, 구민2
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| 소속 |
1국가핵융합(연), 2그린사이언스 |
| 키워드 |
Microwave plasma torch; plasma reactor; reverse vortex
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| E-Mail |
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