| 학회 |
한국재료학회 |
| 학술대회 |
2021년 가을 (11/24 ~ 11/26, 경주 라한호텔) |
| 권호 |
27권 2호 |
| 발표분야 |
E. 환경/센서 재료 분과 |
| 제목 |
Preparation of aluminum doped ZnO thin films for discriminative detection of volatile organic compounds |
| 초록 |
Aluminum doped zinc oxide (AZO) thin films were fabricated by using industrially applicable cost-effective spray pyrolysis technique. During the fabrication process, doping concentration was varied form 0-5 at. % by varying the molar ratio of aluminum and zinc precursor in spraying solution. Prepared solution was sprayed on top of pre-heated glass slides, which was maintained at 350 ℃. Normal ambient air was used as carrier gas at the pressure of 2 bar and sprayed from 26cm away from the substrate. Prepared thin films were probed using various characterization techniques such as x-ray diffraction (XRD), scanning electron microscopy (SEM), UV-Visible spectroscopy to get an insight into the material formation. Electrical and gas sensing characterizations are also being performed in detail to evaluate its possible application as a transparent conductors and gas sensors. Analyzed XRD data shows continuous decrease in grain size with increase in aluminum doping concentration in ZnO thin films. Extracting the other details such as interplanar distance and lattice parameters from XRD data, it was perceived that there was a negligible random variation. As observed from SEM images, aluminum doping to ZnO modifies the surface morphology of thin films. Randomly oriented plate like structures in pure ZnO thin films changes to clustered granular morphology with increasing aluminum concentration. Two aluminum contact pads were thermally evaporated on prepared thin films and subjected to measure I-V characteristics, shows linear characteristics with minimum resistivity of 0.517Ωm. Also, ~80% transmittance in visible region was achieved at an optimal aluminum doping concentration of 3 at. % . Gas sensing characterization performed on aluminum doped ZnO shows enhanced sensing properties towards volatile organic compound vapors such as acetone and ethanol. At 3 at. % Al doping concentration, ZnO thin films were capable of detecting 100ppm of ethanol and acetone with a highest response of ~60%. Al incorporation to ZnO lattice is also helpful in bringing down the response and recovery time towards acetone and ethanol with very short response time of 3 seconds and recovery time of 28 seconds. For selective detection of acetone and ethanol, principal component analysis was performed by acquiring data points from response curves at different intervals, which shows proper discrimination between acetone and ethanol. |
| 저자 |
S.P. Bharath1, Kasturi V. Bangera2, 김현우3, 김상섭4
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| 소속 |
1Hanyang Univ., 2National Institute of Technology Karnataka, 3한양대, 4인하대 |
| 키워드 |
<P>Aluminum doped ZnO; thin film; discriminative detection; volatile organic compounds</P>
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| E-Mail |
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