| 초록 |
Superclritical fluid cleaning of metal parts contaminated with metal oxides has been studied. A new technique based on the use of supercritical carbon dioxide has been developed. Various kinds of metal oxides ( Cu, Al, Fe, Ni, W) were selected as the contaminants on metal parts. Appropriated co-solvent and surfactant were added to the supercritical carbon dioxide process in order to increase the total removal efficiency. A micriscope, XPS and contact angle meter were used to analyze the surface of metal parts. When co-solvent and surfactant were added to the carbon dioxide, the removal efficiency of metal oxides improved significantly.
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