| 초록 |
Fluorinated polyimides derived from 1,3-bis(4-amino-2-trifluoromethylphenoxy)benzene (mBATB) and various dianhydrides (BTDA, ODPA, 6FDA) was synthesized via thermal and chemical imidization. Residual stress behaviors of fluorinated polyimides were measured by Thin Film Stress Analyzer (TFSA) in situ. Residual stress behaviors of flexible fluorinated polyimides represented comparatively higher values than typical rigid polyimides like PMDA-ODA. In the case of these polyimides, flexible structures like ether linkage and bulky CF3 group influenced to increase residual stress because thermal stress as well as intrinsic stress effected to residual stress simultaneously. Also residual stress could be affected by being or not of specific functional group in the main chain, crystallity in the thin film which depends on Tg and process temperature. |
