화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2005년 봄 (04/14 ~ 04/15, 전경련회관)
권호 30권 1호, p.635
발표분야 기능성 고분자
제목 Dewetting-Assisted Microdome Formation
초록 In present study, we report a simple route for the formation of microdome arrays on the patterned substrates using spin-dewetting procedures (SPD). Patterned structures with various shapes and sizes were realized using UV lithography with photosensitive silsesquioxanes. Forms (rations of height to diameter) of microdomes could further controlled through surface tension of the substrate and array material as well as pattern size. It is found that microdome’s size increase with pattern size and decrease with surface tension of material. This study shows that SPD is potential tool for the fabrication of micro-optic and sensor devices such as microlens and cell patterning.
저자 조응수1, 차봉준1, 차국헌2
소속 1서울대, 2화학생물공학부
키워드 microdome; silsesquioxane; patterning; dewetting
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