화학공학소재연구정보센터
학회 한국재료학회
학술대회 2015년 가을 (11/25 ~ 11/27, 부산 해운대그랜드호텔)
권호 21권 2호
발표분야 F. 광기능/디스플레이 재료
제목 High Performance Zinc Oxynitride-Based Thin-Film Transistors for Next-Generation Display Applications
초록    Increasing demands for high performance switching or driving transistors in the flat panel display industry have led to the development of high mobility metal oxide semiconductors such as In-Ga-Zn-O (IGZO). Thin-film transistors (TFT) incorporate such materials exhibit field effect mobility, exceeding 10 cm2/Vs, and are suitable for the fabrication of ultra definition (4000 x 2000 pixels), large size (> 70 inch) displays operating at extremely high frame rate (> 480 Hz). However, further advances in display technoligy aim at producing 3D image or driving organic light-emitting diodes (OLED) while satisfying the above criteria. In this regard, transistors with even higher field effect mobility (> 30 cm2/Vs) must be integrated in the backplane array.

   In this work, an alternative type of high mobility semiconductor, zinc oxynitride (ZnON), is studied by both thoretical first-principles calculations and experimental evaluation of thin films and TFT devices.
저자 김현석
소속 충남대
키워드 <P>Zinc Oxynitride (ZnON); Thin-Film Transistors (TFT)</P>
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