| 초록 |
Tantalum metal nanoparticles were produced by decomposing tantalum pentachloride into tantalum and hydrogen chloride in hydrogen. Experimental setup consists of a glove box, a load cell, a vaporizer, a tubular furnace, and a particle collector. Produced Ta nanoparticles were deposited on a TEM grid to be analyzed their size and crystallinity. The precursor concentration at the reaction condition ranged from 0.12 to 0.17 mol%, and the residence time was kept at 3.1 s based on the reactor set temperature varying from 600 to 1000°C. The number average particle size was 45, 43, 26, 26, 25 nm at 600, 700, 800, 900, and 1000°C, respectively. At the temperature of 600°C, particle size distribution was bimodal with average particle sizes of 38 nm and 137 nm. All the particles were spherical except that a few numbers of particles at 1000°C were polyhedral. Diffraction patterns of the particles showed that the phase was amorphous at 600℃, increasing crystalline phase with the reactor temperature. |
