| 학회 |
한국재료학회 |
| 학술대회 |
2007년 가을 (11/02 ~ 11/02, 성균관대학교) |
| 권호 |
13권 2호 |
| 발표분야 |
반도체재료 |
| 제목 |
Synthesis of ZnO nanorods on ZnO/Si(100) and Al2O3/Si(100) substrates by hydrothermal method |
| 초록 |
ZnO nanorods were grown on the ZnO/Si(100) and Al2O3/Si(100) substrates by hydrothermal method. The ZnO buffer layer was grown on the Si(100) substrate prior to hydrothermal synthesis by spin-coating method. The buffer layer, Al2O3, was grown on Si (100) by ALD (atomic layer deposition) method. The effects of various hydrothermal growth parameters were studied in this experiment. PL (photoluminescence) spectra, SEM (scanning electron microscope) and XRD (X-ray diffraction) methods were done for characterization. |
| 저자 |
Xiuqin Zhao1, Jae Yeop Lee2, Cho-Rong Kim3, Jae-Young Leem1, Hyukhyun Ryu2, Mi-Na Jung3, Ji-Ho Chang1, Hong Chan Lee2
|
| 소속 |
1Center for Nano Manufacturing, 2Department of Nano Systems Engineering, 3Inje Univ. |
| 키워드 |
ZnO; nanorod; hydrothermal method; ALD; Al2O3
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| E-Mail |
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