초록 |
Positive-working, aqueous-base-developable photosensitive ethynyl-end-capped polybenzoxazole precursors based on ethynyl-end-capped poly(hydroxyamide)s and a diazonaphthoquinone photosensitive compound were developed. The ethynyl-end-capped poly(hydroxyamide)s were prepared from a direct polymerization of 2,2’-bis-(3-amino-4-hydroxyphenyl)hexafluoropropane (6FAP), 4,4’-oxydibenzoyl chloride (ODBC) and 4-Ethynylaniline in the presence of pyridine as a catalyst. Subsequently, the thermal cyclization of the ethynyl-end-capped poly(hydroxyamide) precursors at 300°C produced the corresponding polybenzoxazoles. |