학회 | 한국공업화학회 |
학술대회 | 2016년 가을 (10/26 ~ 10/28, 제주국제컨벤션센터(ICCJEJU)) |
권호 | 20권 2호 |
발표분야 | 무기재료_포스터 |
제목 | The fabrication of perovskite(CH3NH3PbI3) solar cell by Reactive Ion Etching (RIE) treatment of mesoporous TiO2 (mp-TiO2) |
초록 | In perovskite solar cell, electron transport layer (ETL) which normally used mp-TiO2 is essential to extract electrons and decrease the hysteresis in perovskite solar cell I-V curve. However, mp-TiO2 is composed of organic binder which affect to interrupt the electrons transport. Therefore, for removing of organic binder, high temperature process (500℃) is necessary. In this reason, the fabrication of flexible perovskite solar cell is limited. In the present study, we tried to treat mp-TiO2 layer by Reactive Ion Etching (RIE) process. We controlled plasma power of RIE, atmosphere of chamber(ratio of Ar and O2) and reaction time. We checked removal of organic binder with mp-TiO2 by XPS and formation of good crystallinity of anatase TiO2 phase by XRD and TEM. Finally we not only optimized the process of RIE instead of high temperature process but also fabricated good efficiency of perovskite solar cells. |
저자 | 한만형, 정현석, 권승리 |
소속 | 성균관대 |
키워드 | perovskite. solar cell; Reactive Ion Etching; Low temperature process |