| 초록 |
Plastic substrates are widely used in many flexible electronic applications such as OLED and OTFTs. However, the high permeability against water vapor and oxygen induces degradation of organic electronic device deposited on them. Therefore, proper permeation barrier films are required for stable operation of organic devices. The most commonly used vapor and oxygen barrier layer are inorganic materials due to their excellent moisture and oxygen barrier even though they are extremely thin film phase. However, the barrier performance of these inorganic barrier coatings limited because of defects (pibholes and cracks) in the coating and process conditions. Therefore, in this research, by using SiNx films deposited by plasma-enhanced chemical vapor deposition (PECVD) at different process condition and by using wet-etching visualization method for pinhole detection, correlation of pinhole density and permeation property has been investigated. |
