화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2006년 가을 (10/27 ~ 10/28, 고려대학교)
권호 12권 2호, p.2430
발표분야 재료
제목 Characterization of ZnO nanorod array fabricated on Si wafer by low temperature synthesis method
초록 We characterized the properties of ZnO nanorod array fabricated on Si wafer using a novel low temperature solution method. For ZnO nanorod growth, we prepared ZnO thin buffer layer coated silicon substrate using sputtering method. ZnO nanorods were grown on the ZnO buffer coated silicon substrate by hydrothermal treatment in the zinc salt and ammonia aqueous solution. The growth temperature was 90℃. Prepared ZnO nanorod array were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD). We also investigated the growth behavior of ZnO nanorod upon the buffer layer annealing.
저자 탁영조, 용기중
소속 포항공과대
키워드 ZnO; nanorod; solution method; buffer
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