| 학회 | 한국재료학회 |
| 학술대회 | 2008년 봄 (05/22 ~ 05/23, 상록리조트) |
| 권호 | 14권 1호 |
| 발표분야 | 반도체재료 |
| 제목 | Fabrications of Si-based nanostructures prepared by electrochemical processing |
| 초록 | A variety of periodically-patterned-nanostructure arrays such as nanopillars, nanocones, squared walls, pyramids, truncated pyramids was fabricated using electrochemical etching processes which were combined with top-down optical lithography. Basic principles and their potential applications are also briefly covered. |
| 저자 | 이정호 |
| 소속 | 한양대 |
| 키워드 | electrochemical etching; silicon nanostructure; nanowire |
