| 학회 | 한국공업화학회 |
| 학술대회 | 2005년 봄 (05/13 ~ 05/14, 충남대학교) |
| 권호 | 9권 1호 |
| 발표분야 | 화학공정 |
| 제목 | 재생 염화 철 에칭액에 잔류하고 있는 유기첨가물 모니터링방법 |
| 초록 | In this study, the method analyzing and monitoring organic additives within the recycled ferric chloride etching solution was proposed. Generally, Gas Chromatography, Raman and Infra-Red spectroscopy have been used as the quantitative analysis method of organic compounds. Of them, Infra-Red spectroscopy was respected as the most competitive tool in the reason of easy-maintenance, lower installation cost , lower analytical error and so on. And it can be used as the monitoring tool in process lines for production. So, we investigated the basic points of extract(pre-treating agent), sample container and conditions considering IR spectroscopy. |
| 저자 | 양천회1, 심환보2, 조영근2, 김인홍3, 박광호3, 박종무3 |
| 소속 | 1한밭대, 2(주)인시츄테크, 3LG마이크론 |
| 키워드 | etching solution; monitoring tool |
