화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2007년 가을 (10/11 ~ 10/12, 일산킨텍스)
권호 32권 2호
발표분야 신진연구자 특별 심포지움
제목 Orientational Control of Block Copolymer Nanostructures
초록 We present efficient room temperature surface modification chemistry for controlling the orientation of the BCP microdomains (cylinder or lamella) on any substrate. Instead of previous thermal crosslinking reaction, negative-tone photoresist chemistry was exploited to formulate patterned neutral surfaces. An ultra-thin photo-crosslinked random copolymer film was designed as a robust interfacial layer between the block copolymer and the substrate. The composition of the copolymer was finely tuned to tailor the wetting behavior to the top block copolymer film and optimize the photo-crosslinking process. The photo-patterning of BCP orientation can be potentially integrated with the existing lithography process to create device oriented structures.
저자 인인식
소속 충주대
키워드 block copolymer; nanostructure; orientation; lithography
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