| 학회 |
한국화학공학회 |
| 학술대회 |
2008년 봄 (04/23 ~ 04/25, 제주ICC) |
| 권호 |
14권 1호, p.1119 |
| 발표분야 |
재료 |
| 제목 |
Palladium Catalyzed Copper Films Deposited from Two Immiscible Supercritical Phases and Subsequent Reaction |
| 초록 |
Palladium (Pd) catalyzed copper (Cu) films were produced by forming Cu (II) compound (Cu(hfac)2•H2O) and Pd (II) compound (Pd(hfac)2) films on native oxide of silicon (SiOx) and titanium nitride (TiN) substrates using a displacement from two immiscible supercritical phases (DISP) technique followed by reducing the organometallic compounds films in hydrogen at 200 oC. The morphology of Cu films was observed using scanning electron microscopy (SEM) and atomic force microscopy (AFM). In the absence of Pd(hfac)2, Cu particles in the range of 60-95 nm formed on SiOx and TiN during 5 min reduction period. As Pd(hfac)2 concentration increased to 5 mole% (relative to the amount of Cu(hfac)2•H2O), a morphology transition from particle to film was observed. When Cu(hfac)2•H2O concentration varied from 0.1 wt% to 3 wt% at a fixed Pd(hfac)2 concentration of 5 mole%, highly dense and adherent films with 10-40 nm in thickness were produced. Root mean square (rms) roughness of these films, estimated by AFM images, is in the range of 1.7-5.8 nm. |
| 저자 |
김재훈1, Ruben G. Carbonell2, 김재덕1
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| 소속 |
1한국과학기술(연), 2North Carolina State Univ. |
| 키워드 |
Cu film; Cu particles; Supercritical fluids; Deposition
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| E-Mail |
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| 원문파일 |
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