| 학회 | 한국재료학회 |
| 학술대회 | 2003년 가을 (11/21 ~ 11/22, 연세대학교) |
| 권호 | 9권 2호 |
| 발표분야 | 기타 |
| 제목 | 이축 배향화된 전도성 복합 산화물의 금속 기판의 제조와 분석 |
| 초록 | Abstract The development of a buffer layer is an important issue for the second -generation wire, YBCO coated metal wire. The buffer layer demands not only on the prohibition of the reaction between YBCO and metal substrate, but also the proper lattice match and conductivity for high critical current density (Jc) of YBCO superconductor. In order to satisfy these demands, we suggested CaRuO3 as a useful candidate having that the lattice mismatches with Ni (200) and with YBCO are 8.2% and 8.0%, respectively. The CaRuO3 thin films were deposited on Ni substrates using various methods, such as e-beam evaporation and DC and RF magnetron sputtering. These films were investigated using SEM, XRD, pole-figure and AES. In e-beam evaporation, the deposition temperature of CaRuO3 was the most important since both bi-axial texturing and NiO formation between Ni and CaRuO3 depended on it. Also, the oxygen flow rate had an effect on the growth of CaRuO3 on Ni substrates. The optimal conditions of crystal growth and film uniformity were 400'C, 50 mA and 7 kV when oxygen flow rate was 70~100sccm. In RF magnetron sputtering, CaRuO3 was deposited on Ni substrates with various conditions and annealing temperatures. As a result, the conductivity of CaRuO3 thin films was dependent on CaRuO3 layer thickness and fabrication temperature. We suggested the multi-step deposition, such as two-step deposition with different temperature, to prohibit the NiO formation and to control the bi-axial texture. |
| 저자 | Sooyeon Han1, Jongin Hong2, Youngah Jeon3, Huyong Tian4, Yangsoo Kim1, Kwangsoo No2 |
| 소속 | 1Electronic & Optical Materials Lab., 2Department of Material Science and Engineering, 3Korea Advanced Institute of Science and Technology, 4Korea |
| 키워드 | Coated conductor; CaRuO3; NiO layer |
