화학공학소재연구정보센터
학회 한국재료학회
학술대회 2008년 가을 (11/07 ~ 11/07, 차세대융합기술연구원)
권호 14권 2호
발표분야 전자재료
제목 TiO2 Nanocarving Process: Selective and Anisotropic Nanosized-Etching of Bulk TiO2 into Nanofibers
초록 The widespread utilization of nano-structured materials is often complicated by the conflicting demands for precise control of fine features (down to the nanometer scale) and for large-scale mass production. Recently, a simple, inexpensive gas phase reaction termed as “nanocarving process” has been developed for TiO2 single crystal nanofibers.  The nanocarving process converts TiO2 grains into arrays of single crystal nanofibers by selective and anisotropic etching. Unlike other nano-structure forming techniques, nano-carving doesn’t require any sophisticated equipment.  All one needs to produce the structure is a controlled atmosphere furnace for a subsequent heat treatment (5% H2/N2 at 700 °C).  This process yields high surface area structures that are well attached to a substrate making them easy to adapt for industrial and commercial applications. This presentation reviews the condition for the nanocarving process and discusses the mechanism of the selective etching
저자 유세훈
소속 한국생산기술(연)
키워드 TiO2; Nanofiber; Nanowire; Synthesis; Etching
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