| 학회 | 한국공업화학회 |
| 학술대회 | 2005년 봄 (05/13 ~ 05/14, 충남대학교) |
| 권호 | 9권 1호 |
| 발표분야 | 나노 |
| 제목 | Synthesis of SiCN Precursor Functionalized Cinnamate and NIL Process Application |
| 초록 | UV curable inorganic polymers that are sensitive to ultraviolet (UV) irradiation have been widely utilized as photoresists. For instance, in the manufacture of printed circuit boards, negative photoresists are coated on a conducting substrate. The photochemistry of cinnamates involves two photoreactions upon irradiation in the ultraviolet-B (UVB) region of the electromagnetic spectrum. In the present syudy, UV curable inorganic polymer was prepared polysilazane(KiON VL20) with cinnamoyl chloride in the dark room. The characterization of inorganic precursor was investigated by FT-IR, 1H-NMR, 13C-NMR, 29Si-NMR, the molecular weight of polymer was analyzed by GPC, and the thermal property was investigated by TGA. |
| 저자 | 김석선, 홍난영, 김동표 |
| 소속 | 충남대 |
| 키워드 | photoresists; Functionalized Cinnamate |
