| 초록 |
The UV-curable polymers were synthesized by hydrosilylation reaction of polyvinylsiliazane (KiON) and 1,6-hexanediol dimethacrylate at room temperature in the presence of Karstedt’s catalyst. And various behaviors of the polymers including the photosensitivity, thermal stability and ceramic yield will be investigated for the future MEMS applications. The structure of the polymer was characterized by 1H-NMR, 13C-NMR and FT-IR spectra. Nano-scale SiCN ceramic patterns were fabricated by ultraviolet (UV) imprinting lithography with an UV-curable polymer and a nano-scale PDMS mold, followed by post-curing and pyrolysis at 800oC under inert atmosphere. |
