| 학회 |
한국고분자학회 |
| 학술대회 |
2003년 가을 (10/10 ~ 10/11, 부경대학교) |
| 권호 |
28권 2호, p.75 |
| 발표분야 |
특별 심포지엄 |
| 제목 |
Fabrication of Nanopatterns via Colloidal and Soft Lithographies and their Applications to Magnetic Metal Arrays |
| 초록 |
Pattern fabrication of two- or three-dimensional arrangement with well-defined feature sizes is important for biosensors in life sciences and semiconductor processing such as microelectrode arrays and memory devices. Here, we will report the fabrication of various nanopatterns by using soft lithography such as replica molding (or embossing) and colloidal lithography based on self-assembly of colloidal particles. For potential applications, we used the patterned structures as masks to fabricate of patterned magnetic metal arrays which are applicable to electronic and memory storage devices. Acknowledgement: This work was supported by the Brain Korea 21 program and a grant (M102KN010001-02K1401-00212) from the Center for Nanoscale Mechatronics & Manufacturing of the 21st Century Frontier Research Program. |
| 저자 |
최대근, 양승만
|
| 소속 |
한국과학기술원 생명화학공학과 |
| 키워드 |
nanofabrication; soft lithography; magnet metal
|
| E-Mail |
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