초록 |
Effect of dilution gas (He, Ar and N2) on the characteristic electrical power was investigated in the decomposition of CHF3 in a dielectric barrier discharge reactor. A comparison between the dilution gases considered in terms of average power, apparent power, power factor, impedance, and power efficiency on the conversion of CHF3 and selectivity of products. The results indicated that He dilution provided a more homogeneous discharge than the other dilution gases. However, Ar dilution showed a higher conversion of CHF3 under the same power delivery. It suggested that decomposition of CHF3 with Ar as dilution gas obtained a greater energy efficiency. |