| 학회 |
한국재료학회 |
| 학술대회 |
2020년 가을 (11/18 ~ 11/20, 휘닉스 제주 섭지코지) |
| 권호 |
26권 1호 |
| 발표분야 |
A. 전자/반도체 재료 분과 |
| 제목 |
DHF을 사용한 Brush scrubbing에 발생하는 PVA brush의 변화 연구 |
| 초록 |
PVA brush cleaning is the most effective cleaning method in post-CMP cleaning due to the characteristics of PVA. As the small particle cleaning becomes important, the research on the PVA brush is promoted. However, it is difficult to research because of the nonuniform sponge structure and reproducing the actual scrubbing process in the lab. In this paper, pencil type PVA brush scrubbing method was used to shorten the process time and treated by diluted HF and SC-1 cleaning solution to analyze by FE-SEM and 3D-profiler. |
| 저자 |
진승완, 황준길, 한광민, 김동규, 조휘원, 김태곤, 박진구
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| 소속 |
한양대 |
| 키워드 |
PVA brush; deformation
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| E-Mail |
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