화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2018년 봄 (05/02 ~ 05/04, 대구 엑스코(EXCO))
권호 22권 1호
발표분야 나노_포스터
제목 The effect of dielectic layer on cylindrical capacitor based on RF magnetron sputtering
초록 Recently, Internet of Things(IOT) technology has been developed in various ways due to its wide application. This technology gathers enormous amount of data by diverse sensor networks and wearable devices.  Especially, wearable devices on diverse clothing and human skin became on of the most important research topic. In this work, cylindrical capacitor was fabricated on PET fiber by RF magnetron sputtering. By adopting rotation device during the deposition process, the surface state of various thin film had excellent uniformity. Electrodes were deposited by RF magnetron sputtering and dielectric layer was coated by dip-coating method. By changing dielectric layer, cylindrical capacitor showed different performance and capacitance. Also, the dip-coating speed was varied to investigate the effect on capacitance.
저자 엄태훈, 한정인
소속 동국대
키워드 PET fiber; Cylindrical capacitor; RF magnetron sputtering
E-Mail