화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2011년 가을 (10/06 ~ 10/07, 김대중 컨벤션센터)
권호 36권 2호
발표분야 대학원생 구두발표
제목 The effects of dielectric surfaces treated with organic materials on the inorganic a-IGZO based thin film transistors.
초록 Amorphous Induim Gallium Zinc Oxide(a-IGZO) has emerged as representative of metal oxide semiconductors because of its transparency, low temperature process, flexibility and high carrier mobility. And studies about interface between a-IGZO and dielectrics are still largely in progress for controlling its electrical properties. As part of these studeis, we investigated the effect of organic dielectirc surface on a-IGZO based thin film transistors. By treating SiO2 dielectic surface with two kinds of organic materials, SAM and thin polymer film, we can verify that organic dielectric surface seriously affect inorganic semiconductor. From the experiment results, we can apply organic materials to control electron density and furthermore electrical propertie of inorganic semiconductors.
저자 박미정1, 장재영1, 박선욱1, 김지예1, 성지현2, 황지영2, 박찬언1
소속 1포항공과대, 2LG화학
키워드 a-IGZO; self assembled monolayer; TFT
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