화학공학소재연구정보센터
학회 한국재료학회
학술대회 2008년 가을 (11/07 ~ 11/07, 차세대융합기술연구원)
권호 14권 2호
발표분야 전자재료
제목 Micro-patterning of ZnO nanowire arrays
초록 Recent progress in the synthesis and characterization of one-dimensional nanoscale material such as ZnO, and its potential application in constructing nanoscale electronic and optoelectronic devices. Furthermore, for the realization of nanodevices, it is essential that the periodicity and patterns could be controlled and designed with deliberate control over interfeature distance, positions, shape, and orientation controlled ZnO nanowire/nanorod arrays. However, the fabrication of vertical aligned ZnO nanowires comprises high growth temperature and both alkali and acidic medium attacks ZnO as well. Hence, the convention lift-off materials are not suitable for the processing of ZnO nanowires. Herein, we have introduced a new lift-off technique to pattern ZnO nanowires without using any metallic catalyst. The sacrificial layer has high temperature stability and the solvent used to remove sacrificial layer, does not attack ZnO nanowires, which is the major advantage of this technique.
저자 Jyoti Prakash Kar1, 최지혁2, 명재민2
소속 1Yonsei Univ., 2연세대
키워드 ZnO; Nanowires; SEM; Lift-off
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