| 학회 |
한국고분자학회 |
| 학술대회 |
2002년 가을 (10/11 ~ 10/12, 군산대학교) |
| 권호 |
27권 2호, p.225 |
| 발표분야 |
특별 심포지엄 |
| 제목 |
A Study on Photosensitive Polyimide Oligomers with High Degree of Planarization |
| 초록 |
It has been well known that high degree of planarization is one of key properties required for TFT-LCD with good reliability. Therefore, we had synthesized novel colorless polyimide oligomers from 5-(2,5-dioxotetrahydrofuryl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride [DOCDA], aromatic diamine, and functional monoamines with photosensitive group to obtain photosensitive polymer dielectrics with high degree of planarization. In this study, we had investigated relationship of molecular weights of polyimide oligomers and spin coating conditions with degree of planarization over inorganic patterned substrates, which showed that degree of planarization was increased with decrease of molecular weight and deeply related with levelling condition after spin coating process. And we will also discuss some properties of resulting polyimide oligomers such as transmittance, thermal stability as well as photo-patterning property after curing under UV light exposure.
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| 저자 |
심종천1, 김정수*2, 김동석**3, 김경준**, 최길영, 이미혜
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| 소속 |
1한국화학연구언 화학소재연구부, 2*충남대, 3**LG 화학(주) |
| 키워드 |
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| E-Mail |
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