| 학회 |
한국고분자학회 |
| 학술대회 |
2008년 가을 (10/09 ~ 10/10, 일산킨텍스) |
| 권호 |
33권 2호 |
| 발표분야 |
액정/LCD 재료 |
| 제목 |
Propertiesof transparent conductive oxide films deposited on plasticsubstrate by DC magnetron sputtering |
| 초록 |
Two kinds of representative transparent conductive oxide films were deposited on PES substrates by DC magnetron sputtering. Indium tin oxide (ITO) and indium zinc oxide (IZO) films were tested and compared for their applications to transparent electrode on plastic substrates for flexible display. Sheet resistance of ITO decreased with oxygen rate to reach 66 Ω/sq at 1.0 % of O2/Ar ratio, while that of IZO increased with oxygen rate. Annealing ITO after sputtering promoted crystallization to reduce the sheet resistance. However, IZO still remained amorphous state and sheet resistance change was negligible. ITO showed the best value of 65 Ω/sq and IZO showed 48 Ω/sq with transmittance greater than 82%. |
| 저자 |
이종걸1, 이선영2, 김성수1
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| 소속 |
1경희대, 2디스플레이 부품소재 지역혁신센터 |
| 키워드 |
IZO; sputtering; plastic substrate; PES; sheet resistance
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| E-Mail |
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