화학공학소재연구정보센터
학회 한국재료학회
학술대회 2016년 가을 (11/16 ~ 11/18, 경주 현대호텔)
권호 22권 2호
발표분야 A. 전자/반도체 재료 분과
제목 Hetero Bilayer Oxide Dielectrics for Solution Processed Electronics under Low-Voltage Operation
초록   For solution-based low-power modulating electronic devices, we demonstrated that nano-scale bilayer oxide dielectrics formulated by sol-gel precursor solution-based aluminum oxide on induced silicates for low-power-consuming electronic devices under low processing-temperature (below 150℃) and rapid processing rate (within 5 min). We also investigated the photo-irradiation effects show the rough sol-gel films are rapidly smoothened with densification of oxide formation and metal-cation linked silicate layers get to be more activated. All solution-based, Indium-Gallium-Zinc-O (IGZO) oxide thin-film-transistors (TFTs) under low-voltage operation were fabricated on the nano-scale photo-reacted bilayer dielectric films. These further investigations are expected to direct previous solution-processing techniques of metal-oxide materials to highly-productive way.
저자 Won-June Lee1, Sungjun Park2, Jun-Gyu Choi3, Sujin Sung4, Chang-Hyun Kim1, Myung-Han Yoon2
소속 1School of Materials Science and Engineering, 2Gwangju Institute of Science and Technology (GIST), 3Emergent Soft System Research Team, 4RIKEN Center for Emergent Matter Science
키워드 Solution-Processing; Sol-Gel; Oxide; Dielectric; Electronics
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