화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2015년 가을 (10/21 ~ 10/23, 일산 KINTEX)
권호 21권 2호, p.1578
발표분야 공정시스템
제목 Optimal Enhanced Distillation Process for Waste Photoresist Solvents Recovery
초록 Thin flat transistor liquid crystal display (TFT-LCD) manufacturing process generates waste solvents that are not treated appropriately, and are incinerated at high temperatures or processed as a high calorie fuels after photoresistor is removed. In this work, alternative treatment process was proposed. Valuable chemical was recovered using sequential distillation system instead of burning them in high temperature incinerator that cause environmental problem. The conventional sequence of distillation columns, which was optimized then thermally coupled distillation and heat pump-assisted distillation sequence was implemented to further improve the distillation performance. Finally, a comparison was made between the conventional and advanced distillation sequences, and the optimal conditions for enhancing recovery were determined. This study was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (2015R1D1A3A01015621) and by Priority Research Centers Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (2014R1A6A1031189).
저자 이문용, FENG WEI, Wahid Ali, 그레고리 리오누그로호 할비안토, ANDIKA RIEZQA, Yus Donald Chaniago
소속 영남대
키워드 Waste Photoresist Solvents; Optimization; Thermally Coupled Distillation; Heat Pump-Assisted Distillation; Distillation
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