화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2012년 가을 (10/11 ~ 10/12, 창원컨벤션센터)
권호 37권 2호
발표분야 고분자가공/복합재료
제목 Directly 10nm scale patterning on the flexible substrate for high performance transparent electrode by secondary sputtering lithography
초록 Flexible transparent electrode with the combination of high transmittance, electrical conductivity and flexibility are essential for the flexible organic solar cell, light-emitting diodes. Currently, indium tin oxide (ITO) coated film is most often used because ITO has high transparency to visible light and low sheet resistance for electrical current conduction. However, ITO is costly due to limited resources and it is easily brittle. So it is difficult to apply to the flexible electronics. Recently, advances in nano materials research have opened the door for other transparent conductive materials like CNT, graphene, and nanowire. Here we report alternative metallic line pattern for flexible transparent electrodes. This sub 20nm metallic nano pattern on the PDMS is fabricated by secondary sputtering phenomenon with low angle ion milling step and it almost corresponds to transmittance and conductivity compared to the ITO. And metal nanowire has higher flexibility than ITO.
저자 장성우, 전환진, 정희태
소속 KAIST
키워드 Metal nanowire; Secondary sputtering lithography; Flexible electronics; Transparent electronics; Soft electronics
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