| 초록 |
Textured zinc oxide films prepared by sputtering and wet chemical etching have been extensively studied. It has been demonstrated that the combination of sputter deposition and etching technique opens a variety of possibilities to design optimized light trapping schemes for silicon solar cells. A material study on sputtered zinc oxide has been performed and focused on the relationship between surface texture and solar cell performance. In this study, we have studied zinc oxide texturing using wet chemical etching and reactive ion etching. In case of reactive ion etching, we used block co-polymer masks instead of expensive patterned masks. We studied the block co-polymer surface by atomic force microscopy (AFM) and the textured zinc oxide surface by scanning electron microscopy (SEM). It is expected that the organic-inorganic hybrid solar cell efficiency would be increased by zinc oxide texturing, especially using reactive ion etching. |
