| 초록 |
Herein, we developed the process to fabricate well-defined patterns on pre-patterned substrates. At first, to enhance the orientation of nanopatterns of block copolymers (BCPs), grating patterns were produced on the crystal substrate which was cut along the particular crystal plane by thermal anealing. Then, BCPs directly self-assembled on it upon solvent-annealing. It was found that both the nanodots and nanolines of BCPs were effectively oriented by the grating of substrates. Secondly, the crystal structures of either polymers or small molecules were grown on the Si substrates by controlling the evaporation of solvents. Then, these structures were employed not only to guide directly BCP nanostuructures but also to fabricate chemical patterns of polymer brushes. The crystal structures also could be used to prepare the soft mold of PDMS for nanoimprinting. These crystal structures were replicated on a variety of the substrates for their potential applications by using this PDMS mold. |
