화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2012년 가을 (10/11 ~ 10/12, 창원컨벤션센터)
권호 37권 2호
발표분야 구조 규칙성 나노다공성 소재
제목 Manipulation of Nano-sized Pattern Shapes and Arrangement Using Mechanical Treatment
초록 Various methods for soft lithography have been developed due to the temporal and economical limitations of photo lithography, and still a lot of lithographical methods are being developed and studied to apply to different scientific fields. Here, we focus on nano-scale anisotropic patterns formed from a replica molding with curable polymers. We fabricate a stamp having an array of the patterns newly formed from a hexagonal pattern of tens of nanometers composed of dot-shaped vertices. We could successfully transform the dot-patterned feature to an ellipsoidal one and also manipulate its aspect ratio as desired. Furthermore, we were able to stretch the hexagonal pattern while keeping the dot shape the same, so we came up with a new pattern arrangement. Ultimately, we can fabricate a device using the change in optical property of materials having anisotropic structures.
저자 홍나영, 김봉석, 이수진, 신규순
소속 서울대
키워드 nano; pattern; soft lithography; PDMS; AAO
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