| 학회 |
한국화학공학회 |
| 학술대회 |
2003년 가을 (10/24 ~ 10/25, 한양대학교) |
| 권호 |
9권 2호, p.2806 |
| 발표분야 |
재료 |
| 제목 |
Preparation method of ceria particles with nano-size |
| 초록 |
The nano-sized ceria particles via large scale spray pyrolysis were studied. The nano-sized ceria particles were synthesized from firing and milling process with hollow particles prepared by using organic precursor solution. The synthesized ceria particles have been characterized by SEM, TEM, XRD, PSA. The particle size of ceria prepared by using organic precursor solution was smaller than that by using aqueous solution. The particle size was controlled in the range of ~10-500nm by changing type and amount of organic precursor and preparation, calcination and milling conditions. |
| 저자 |
강희상1, 강윤찬2, 손종락2, 정경열2, 박승빈1
|
| 소속 |
1한국과학기술원, 2한국화학(연) |
| 키워드 |
ceria; nano particles; spray pyrolysis; CMP |
| E-Mail |
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| 원문파일 |
초록 보기 |
