화학공학소재연구정보센터
학회 한국공업화학회
학술대회 2016년 봄 (05/02 ~ 05/04, 여수 엑스포 컨벤션)
권호 20권 1호
발표분야 고분자_포스터
제목 High Precision Temperature-Controlled Versatile Rigiflex Mold for  Site-Selective Dewetting and Hierarchical Nanostructure Generation
초록 Compared to conventional photolithography, unconventional lithographic techniques have drawn attention for cost effective, reliable process. However, these techniques are limited in scalability due to relatively complex and time-consuming processes. To challenge this issue, we suggest a simple yet robust strategy for realizing a high precision temperature controlled rigiflex mold directly amenable to printing process with high resolution and site-specific accuracy. The surface temperature of the mold controlled by localized joule-heating could be uniformly tuned over a large surface area. This work can offer a highly precise spatial controllability for patterning on specific regions, and it also shows a great potential for large area pattering and hierarchical structuring readily using step-and-repeat processes.
저자 김광수, 김종욱, 김태일, 유필진
소속 성균관대
키워드 nanofabrication; temperature control; self-heating mold; patterning
E-Mail yoopj@skku.edu