초록 |
Microfluidics is the area of fluid dynamics that concerns with flow in micrometer-size dimensions. Despite the vast area of potential applications such as the micro-electromechanical systems (MEMS), the lack of effective sealing mechanism has hindered the introduction of various materials as substrates. The conventional method of sealing, which involves the oxygen plasma treatment, is only compatible with silicon based materials such as poly(dimethylsiloxane) and glass. Although various kinds of sealing mechanism have been previously introduced, issues have arisen including clogging of the channels. Therefore, in this work, a thin layer of epoxy containing glycidyl methacrylate (GMA) was deposited onto various substrates such as by a newly developed technique called the initiated chemical vapor deposition (iCVD) without damaging them. The substrates were then bonded together with an aliphatic diamine such as ethylenediamine (EDA) via the ring-opening curing reaction of epoxy and amine. |