| 초록 |
In this work, we fabricated three dimensional nanotemplates using crosslinkable block copolymers (BCPs). We synthesized crosslinkable BCP, P(S-r-(S-N3))-b-PMMA, in which 1.5 mol % of crosslinkable azide (N3) groups were incorporated. First, 40 nm thick films of P(S-r-(S-N3))-b-PMMA, exhibiting the hexagonal arrays of perpendicularly oriented cylinders, were prepared on the silicon substrates. After crosslinking the films, cylinder- or lamellar-forming BCPs were prepared without disturbing the underlying layers. For lamellar-forming BCPs, the underlying layers could neutralize the interfacial interactions as PS-r-PMMA random copolymers and thus the perpendicular orientation of lamellae was achieved. The detailed structures of nanostructured multilayers were characterized by atomic force microscope (AFM) and scanning electron microscope (SEM), and grazing-incidence small-angle x-ray scattering (GISAXS). |
