화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2009년 가을 (10/08 ~ 10/09, 광주과학기술원 오룡관)
권호 34권 2호
발표분야 기능성 고분자
제목 Ferroelectric Pattern Arrays of Semi-crystalline P(VDF-TrFE)by Focused Laser Inducing Localized Heat
초록 Information storage devices fabricated from ferroelectric polymers such as poly(vinylidene fluoride-trifluoroethylene) P(VDF-TrFE) have drawn a great attraction due to their potential use in non-volatile memory technology. The important requirement for realizing polymeric memory devices is the capability of micro/nano pattern formation to ensure high-density integration per unit area. Laser induced pattern have been investigated in the phase transition memory(PRAM) and phase transition of polymers. We developed a new patterning process for the micro/nano patterned P(VDF-TrFE) thin films by controlling laser with 650nm in wavelength as a thermal source. The method is based on micro/nano pattern of ferroelectric polymer film on G8S2T11(GST) substrate by laser writing. Local heat generated on GST substrate provides sufficient mobility of the P(VDF-TrFE) chains. After the laser processing, the patterned ferroelectric P(VDF-TrFE) samples were observed by an FESEM and OM. .
저자 배인성, 강석주, 박철민
소속 연세대
키워드 P(VDF-TrFE); laser patterning; FeFET
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