화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2022년 봄 (04/20 ~ 04/23, 제주국제컨벤션센터)
권호 28권 1호, p.1156
발표분야 [주제 12] 화학공학일반(부문위원회 발표)
제목 Design of energy efficient and cost effective chilling system for semiconductor industry
초록 Semiconductor industry requires a sophisticated chilling system to effectively control the process temperature. A process is designed to meet the refrigeration needs of ultra-low temperature chilling system. The required temperature, to be achieved, is -70℃. This temperature can be achieved by adopting a mixed refrigerant utilizing, preferably, refrigerants with low global warming potential and low ozone depletion potential in a simple and efficient configuration. The single mixed refrigeration cycle is simulated in Aspen Hysys to study the behavior of coolant (HFE-7500) and refrigeration cycle. The UNIQUAC thermodynamic package is opted for HFE-7500 properties calculation while Peng Robinson is selected for refrigerants (R-507 and ethylene). The HFE-7500 is not available in Aspen Hysys data base. These components were added using molecular structure and thermophysical properties. The MITA value is kept 3℃. The results show low SEC of 0.042 kWh/kg and COP value of 0.12.
저자 문상기, 이문용, Naquash Ahmad
소속 영남대
키워드 공정시스템(Process Systems Engineering)
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