| 초록 |
ITO(indium tin oxide) was sputtered on various plastic substrates. TCO (transparent conductive oxide) thin films such as ITO have important roles in fabrication of FPD(flat panel display). A RF sputtering deposition method was applied to prepare ITO on various plastic substrates, colorless polyimide(PI), PEN and PES. Process parameters such as RF power, deposition time, deposition temperature are tuned to optimize ITO properties on plastic substrates. Their crystal structure and the surface morphology of the deposited ITO films were examined by XRD, SEM, and AFM. The electrical properties of the conductive films were explored by four-point probing. UV Visible spectrometer was used to measure the optical properties of ITO-coated film. Sheet resistance of ITO-coated films decreased with increasing temperature, RF power. Sheet Resistance of ITO-coated films was 21Ω/㎠ and transmittance 82%. |
