| 학회 |
한국고분자학회 |
| 학술대회 |
2015년 봄 (04/08 ~ 04/10, 대전컨벤션센터) |
| 권호 |
40권 1호 |
| 발표분야 |
분자전자 부문위원회 II |
| 제목 |
Optimization of Al2O3/TiO2 mixed oxide thin film encapsulation for organic light emitting diode via plasma enhanced atomic layer deposition |
| 초록 |
Organic light emitting diodes require a passivation layer that protects the active layers from moisture and oxygen because most organic materials and electrodes are very sensitive to such gases. Passivation films for the encapsulation of organic electronic devices need excellent stability and mechanical properties. In this study, we examined barrier properties of PEALD based Al2O3/TiO2 mixed oxide films with different oxide mixing ratio. We found that the Al2O3/TiO2 mixed oxide film exhibited the lowest WVTR (water vapor transmission rate) when the atomic ratio of Al:Ti is approximatedly 1:1. In addition, OLED devices with Al2O3/TiO2 mixed oxide passivation films were investigated. |
| 저자 |
김래호, 박선욱, 정용진, 백용화, 박찬언
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| 소속 |
포항공과대 |
| 키워드 |
plasma enhaced atomic layer deposition (PEALD); Al2O3; TiO2; encapsulation; organic light emitting diode (OLED); mixed oxide films.
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| E-Mail |
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