| 학회 |
한국재료학회 |
| 학술대회 |
2007년 가을 (11/02 ~ 11/02, 성균관대학교) |
| 권호 |
13권 2호 |
| 발표분야 |
전자재료 |
| 제목 |
ZnO nanorod and nanoneedle prepared by direct current magnetron sputtering |
| 초록 |
In this study, we report the zinc oxide nanorod and nanoneedle growth on glass substrates by direct current magnetron sputtering, which has not been reported before to the best of our knowledge. The zinc oxide nanorods and nanoneedles are irregularly angled, having many branches at low oxygen flow. The effect of zinc oxide nano crystallization on the photoluminescence (PL) is a great increase in visible luminescence. Room-temperature photoluminescence property was enhanced to 100 times by the growth of nanorod. We controlled oxygen flow in direct magnetron sputtering process. X-ray diffraction pattern shows the polycrystalline structure only at low oxygen flow. Peak intensity of the zinc oxide films were increased by annealing process in argon gas. Based on the experimental observation, we suggest that the high visible luminescence property of zinc oxide nanorod prepared by direct current magnetron sputtering can be applied for various optical devices. |
| 저자 |
In-June Kim1, In-Soo Kim2, Se-Young Choi3
|
| 소속 |
1School of New Materials Science and Engineering, 2Yonsei Univ., 3Department of Ceramic Engineering |
| 키워드 |
ZnO; nanorod; photoluminescence; DC magnetron sputtering
|
| E-Mail |
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