화학공학소재연구정보센터
학회 한국고분자학회
학술대회 2003년 가을 (10/10 ~ 10/11, 부경대학교)
권호 28권 2호, p.410
발표분야 특별 심포지엄
제목 Preparation of metal nano structure via thin films of diblock copolymers
초록 Hexagonal and high-density magnetic particle arrays can be applied to memory storage, optical devices, and catalysts. Block copolymers provide a self-assembled template that can also be used for nanolithography with cheaper cost and easier processing.
Our research is aimed at fabricating metal nanodots, such as cobalt or nickel, followed by raising carbon nanotubes on them, which can be applied to FED(Field Emission Display).
Asymmetric P(S-b-MMA) was spin coated on gold-coated Si wafer and annealed at 150℃ in a vacuum oven for 2 days. After obtaining hexagonally well ordered films, we fabricated polystyrene template with nanoholes after removing the polymethylmethacrylate domains via UV exposure followed by rinsing in acetic acid. Chromium and nickel are successively evaporated onto the template. After removing polystyrene matrix with metal on top, we obtained hexagonally ordered Ni nanodots. We also tried to fabricate cobalt metal patterning by another method, electro-deposition.
저자 최남욱, 이춘수, 조재영
소속 서울대
키워드 P(S-b-MMA); nano patterning; electrodeposition
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