화학공학소재연구정보센터
학회 한국화학공학회
학술대회 2013년 가을 (10/23 ~ 10/25, 대구 EXCO)
권호 19권 2호, p.2188
발표분야 환경
제목 Decomposition of PFCs by low power arc plasma system
초록 Perfluorocompounds (PFCs) are serious non-degradable global warming gases. Although thermal plasmas can decompose PFCs with a high conversion rate, they consume electricity on a large scale. In the present work, a low power arc plasma torch has been developed to reduce operating cost of the thermal plasma gas treatment process. Effects of the net power of plasma flame and reactive gas additives on the destruction and removal efficiencies (DRE) for typical PFCs were examined. The input power and waste gas flow rate were controlled from 2 to 3 kW and from 70 to 150 L/min, respectively. The maximum DREs of NF3, SF6 and CF4 were 90%, 15% and 4%, respectively, without reaction gases at the highest input power of 3 kW and the lowest waste gas flow rate of 70 L/min. The DRE of PFCs, however, were notably improved with a small amount of additional reactive gases. Hydrogen showed better effect to decompose PFCs than oxygen. With the help of reactive hydrogen, DREs of NF3, SF6 and CF4 were improved to 99.2%, 39.3% and 25.0% respectively, even in the case of increased waste gas flow rate of 100 L/min at the fixed input power of 3 kW.
저자 박현우, 박동화
소속 인하대
키워드 low power arc plasma; DRE of PFCs; Reactive gas; CF4; SF6; NF3
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